Sensirion LPG10-1000 Digital Planar Liquid Flow Sensor Leave a comment

Sensirion LPG10-1000 Digital Planar Liquid Flow Sensor provides high performance and speed in measuring liquid flow in a planar microfluidic glass substrate with down-mount fluidic ports for highly compact integration into any fluidic manifold system. Measuring 10mm x 10mm x 2.35mm3, the LPG10-1000 is ideal for high-volume applications with strict space limitations. Microfluidics chips and digital microsensor chips are combined to measure liquid flow inside a planar glass substrate. The digital microsensor chip provides full signal processing functionality for a fully calibrated, temperature compensated, linearized digital output.

The LPG10-1000 is a smart sensor solution offering flow rates from the low microliter per minute to 1ml/min. Glass, the wetted material, ensures optimum compatibility with biological and pharmaceutical processes. Due to the small thermal mass, response times below 30ms can be reached. The Sensirion LPG10-1000 Digital Planar Liquid Flow Sensor also offers real-time detection of failures such as clogging, air bubbles, or leaks.


  • Ultra-small 10mm x 10mm x 2.35mm size
  • Excellent repeatability
  • Completely calibrated, digital linearized output signal
  • Excellent media compatibility and chemical resistance
  • Media isolated sensing principle – no direct sensor contact with the fluid
  • Bio-compatible and consists of inert materials
  • Digital I2C interface


  • 1000µl minimum full-scale flow rate
  • 1500µl minimum sensor output limit
  • Response time
    • 40ms for flow detection
    • 120ms for power-up
  • Temperature ranges
    • +5°C to +50°C operating
    • -40°C to +60°C storage
  • 0 to 95% humidity, non-condensing
  • 3bar (43psi) recommended maximum operating pressure
  • 7bar (101psi) burst pressure
  • Digital sampling time
    • 74ms at 16-bit
    • 1ms at 9-bit
  • 3.3VDC to 3.6VDC operating voltage range
  • <6mA typical operating current
  • Borosilicate glass internal substrate channel material
  • Downmount fluidic connection
  • 0.1mbar pressure drop at the full-scale flow rate
  • ~11.7µl total internal volume
  • ~0.32g total mass
  • ~0.9mm x 0.9mm cross-section flow channel

Development Tools

Sensirion LPG10-1000 Evaluation Kit

Evaluation kit for testing the LPG10-1000 Digital Planar Liquid Flow Sensors

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